10/10/2011	9:15:29 AM	Main Vac valve closed
10/10/2011	9:15:30 AM	SiCl4 pre valve closed
10/10/2011	9:15:31 AM	SiCl4 post valve closed
10/10/2011	9:15:32 AM	H2 valve closed
10/10/2011	9:15:32 AM	Helium valve closed
10/10/2011	9:15:34 AM	Helium MFC set to  0.000000
10/10/2011	9:15:36 AM	H2 MFC set to  0.000000
10/10/2011	9:15:54 AM	Helium valve opened
10/10/2011	9:15:57 AM	H2 valve opened
10/10/2011	9:16:00 AM	Helium MFC set to  50.000000
10/10/2011	9:16:02 AM	H2 MFC set to  50.000000
10/10/2011	9:16:04 AM	SiCl4 post valve opened
10/10/2011	9:16:06 AM	SiCl4 pre valve opened
10/10/2011	9:16:08 AM	Bypass valve opened
10/10/2011	9:16:20 AM	Helium MFC set to  500.000000
10/10/2011	9:16:22 AM	H2 MFC set to  500.000000
10/10/2011	9:21:19 AM	Bypass valve closed
10/10/2011	9:21:19 AM	Main Vac valve opened
10/10/2011	9:29:44 AM	Main Vac valve closed
10/10/2011	9:29:46 AM	SiCl4 pre valve closed
10/10/2011	9:29:46 AM	SiCl4 post valve closed
10/10/2011	9:29:47 AM	H2 valve closed
10/10/2011	9:29:47 AM	Helium valve closed
10/10/2011	9:30:12 AM	SiCl4 post valve opened
10/10/2011	9:30:12 AM	SiCl4 pre valve opened
10/10/2011	9:30:21 AM	SiCl4 pre valve closed
10/10/2011	9:30:25 AM	Bypass valve opened
10/10/2011	9:30:33 AM	Bypass valve closed
10/10/2011	9:30:34 AM	SiCl4 pre valve opened
10/10/2011	9:30:51 AM	Helium MFC set to  50.000000
10/10/2011	9:31:01 AM	Helium valve opened
10/10/2011	9:31:11 AM	Helium MFC set to  500.000000
10/10/2011	9:32:23 AM	SiCl4 post valve closed
10/10/2011	9:32:24 AM	SiCl4 pre valve closed
10/10/2011	9:32:25 AM	Helium valve closed
10/10/2011	9:32:29 AM	Bypass valve opened
10/10/2011	9:32:43 AM	Helium MFC set to  0.000000
10/10/2011	9:32:46 AM	SiCl4 MFC set to  0.000000
10/10/2011	9:32:49 AM	H2 MFC set to  500.000000
10/10/2011	9:33:41 AM	Bypass valve closed
10/10/2011	9:33:42 AM	Main Vac valve opened
10/10/2011	9:34:11 AM	Main Vac valve closed
10/10/2011	9:34:12 AM	H2 valve opened
10/10/2011	9:35:34 AM	H2 valve closed
10/10/2011	9:38:14 AM	Bypass valve opened
10/10/2011	9:38:58 AM	Bypass valve closed
10/10/2011	9:38:58 AM	Main Vac valve opened
10/10/2011	9:40:58 AM	Helium MFC set to  500.000000
10/10/2011	9:41:00 AM	Main Vac valve closed
10/10/2011	9:41:01 AM	Helium valve opened
10/10/2011	9:42:09 AM	Helium valve closed
10/10/2011	9:42:10 AM	Bypass valve opened
10/10/2011	9:42:23 AM	H2 MFC set to  0.000000
10/10/2011	9:42:26 AM	Helium MFC set to  0.000000
10/10/2011	9:43:08 AM	Bypass valve closed
10/10/2011	9:43:09 AM	Main Vac valve opened
10/10/2011	9:44:16 AM	Main Vac valve closed
10/10/2011	9:44:24 AM	H2 MFC set to  0.000000
10/10/2011	9:44:27 AM	Helium MFC set to  500.000000
10/10/2011	9:44:28 AM	Helium valve opened
10/10/2011	9:45:36 AM	Helium valve closed
10/10/2011	9:45:38 AM	Bypass valve opened
10/10/2011	9:46:43 AM	Bypass valve closed
10/10/2011	9:46:44 AM	Main Vac valve opened
10/10/2011	9:49:43 AM	Main Vac valve closed
10/10/2011	9:49:52 AM	Main Vac valve opened
10/10/2011	9:51:04 AM	Recipe started at 9:51 AM
10/10/2011	9:51:04 AM	Helium valve closed
10/10/2011	9:51:04 AM	H2 valve closed
10/10/2011	9:51:04 AM	BCl3 valve closed
10/10/2011	9:51:04 AM	PH3 valve closed
10/10/2011	9:51:04 AM	SiCl4 pre valve closed
10/10/2011	9:51:04 AM	SiCl4 post valve closed
10/10/2011	9:51:04 AM	Main Vac valve closed
10/10/2011	9:51:04 AM	Bypass valve closed
10/10/2011	9:51:04 AM	Bubbler valve closed
10/10/2011	9:51:04 AM	Helium MFC set to  0.000000
10/10/2011	9:51:04 AM	H2 MFC set to  0.000000
10/10/2011	9:51:04 AM	BCl3 MFC set to  0.000000
10/10/2011	9:51:04 AM	PHl3 MFC set to  0.000000
10/10/2011	9:51:04 AM	SiCl4 MFC set to  0.000000
10/10/2011	9:51:04 AM	Bypass solenoid MFC set to  0.000000
10/10/2011	9:51:04 AM	Tube furnace set to 0
10/10/2011	9:51:07 AM	Helium valve closed
10/10/2011	9:51:07 AM	BCl3 valve closed
10/10/2011	9:51:07 AM	PH3 valve closed
10/10/2011	9:51:07 AM	SiCl4 pre valve closed
10/10/2011	9:51:07 AM	SiCl4 post valve closed
10/10/2011	9:51:07 AM	Main Vac valve closed
10/10/2011	9:51:07 AM	Bypass valve closed
10/10/2011	9:51:07 AM	Bubbler valve closed
10/10/2011	9:51:07 AM	H2 valve opened
10/10/2011	9:51:07 AM	Helium MFC set to  0.000000
10/10/2011	9:51:07 AM	H2 MFC set to  500.000000
10/10/2011	9:51:07 AM	BCl3 MFC set to  0.000000
10/10/2011	9:51:07 AM	PHl3 MFC set to  0.000000
10/10/2011	9:51:07 AM	SiCl4 MFC set to  0.000000
10/10/2011	9:51:07 AM	Bypass solenoid MFC set to  0.000000
10/10/2011	9:51:07 AM	Tube furnace set to 0
10/10/2011	9:52:16 AM	Helium valve closed
10/10/2011	9:52:16 AM	BCl3 valve closed
10/10/2011	9:52:16 AM	PH3 valve closed
10/10/2011	9:52:16 AM	SiCl4 pre valve closed
10/10/2011	9:52:16 AM	SiCl4 post valve closed
10/10/2011	9:52:16 AM	Main Vac valve closed
10/10/2011	9:52:16 AM	Bypass valve closed
10/10/2011	9:52:16 AM	H2 valve opened
10/10/2011	9:52:16 AM	Bubbler valve opened
10/10/2011	9:52:16 AM	Helium MFC set to  0.000000
10/10/2011	9:52:16 AM	H2 MFC set to  500.000000
10/10/2011	9:52:16 AM	BCl3 MFC set to  0.000000
10/10/2011	9:52:16 AM	PHl3 MFC set to  0.000000
10/10/2011	9:52:16 AM	SiCl4 MFC set to  0.000000
10/10/2011	9:52:16 AM	Bypass solenoid MFC set to  0.000000
10/10/2011	9:52:16 AM	Tube furnace set to 0
10/10/2011	9:52:17 AM	Helium valve closed
10/10/2011	9:52:17 AM	BCl3 valve closed
10/10/2011	9:52:17 AM	PH3 valve closed
10/10/2011	9:52:17 AM	SiCl4 pre valve closed
10/10/2011	9:52:17 AM	SiCl4 post valve closed
10/10/2011	9:52:17 AM	Main Vac valve closed
10/10/2011	9:52:17 AM	Bypass valve closed
10/10/2011	9:52:17 AM	H2 valve opened
10/10/2011	9:52:17 AM	Bubbler valve opened
10/10/2011	9:52:17 AM	Helium MFC set to  0.000000
10/10/2011	9:52:17 AM	H2 MFC set to  500.000000
10/10/2011	9:52:17 AM	BCl3 MFC set to  0.000000
10/10/2011	9:52:17 AM	PHl3 MFC set to  0.000000
10/10/2011	9:52:17 AM	SiCl4 MFC set to  0.000000
10/10/2011	9:52:17 AM	Bypass solenoid MFC set to  0.000000
10/10/2011	9:52:17 AM	Tube furnace set to 1000
10/10/2011	10:12:17 AM	Helium valve closed
10/10/2011	10:12:17 AM	BCl3 valve closed
10/10/2011	10:12:17 AM	PH3 valve closed
10/10/2011	10:12:17 AM	Main Vac valve closed
10/10/2011	10:12:17 AM	Bypass valve closed
10/10/2011	10:12:17 AM	H2 valve opened
10/10/2011	10:12:17 AM	SiCl4 pre valve opened
10/10/2011	10:12:17 AM	SiCl4 post valve opened
10/10/2011	10:12:17 AM	Bubbler valve opened
10/10/2011	10:12:17 AM	Helium MFC set to  0.000000
10/10/2011	10:12:17 AM	H2 MFC set to  500.000000
10/10/2011	10:12:17 AM	BCl3 MFC set to  0.000000
10/10/2011	10:12:17 AM	PHl3 MFC set to  0.000000
10/10/2011	10:12:17 AM	SiCl4 MFC set to  50.000000
10/10/2011	10:12:17 AM	Bypass solenoid MFC set to  0.000000
10/10/2011	10:12:17 AM	Tube furnace set to 1000
10/10/2011	11:12:18 AM	Helium valve closed
10/10/2011	11:12:18 AM	BCl3 valve closed
10/10/2011	11:12:18 AM	PH3 valve closed
10/10/2011	11:12:18 AM	SiCl4 pre valve closed
10/10/2011	11:12:18 AM	SiCl4 post valve closed
10/10/2011	11:12:18 AM	Main Vac valve closed
10/10/2011	11:12:18 AM	Bypass valve closed
10/10/2011	11:12:18 AM	H2 valve opened
10/10/2011	11:12:18 AM	Bubbler valve opened
10/10/2011	11:12:18 AM	Helium MFC set to  0.000000
10/10/2011	11:12:18 AM	H2 MFC set to  500.000000
10/10/2011	11:12:18 AM	BCl3 MFC set to  0.000000
10/10/2011	11:12:18 AM	PHl3 MFC set to  0.000000
10/10/2011	11:12:18 AM	SiCl4 MFC set to  0.000000
10/10/2011	11:12:18 AM	Bypass solenoid MFC set to  0.000000
10/10/2011	11:12:18 AM	Tube furnace set to 950
10/10/2011	11:13:02 AM	H2 valve closed
10/10/2011	11:13:02 AM	BCl3 valve closed
10/10/2011	11:13:02 AM	PH3 valve closed
10/10/2011	11:13:02 AM	SiCl4 pre valve closed
10/10/2011	11:13:02 AM	SiCl4 post valve closed
10/10/2011	11:13:02 AM	Main Vac valve closed
10/10/2011	11:13:02 AM	Bypass valve closed
10/10/2011	11:13:02 AM	Helium valve opened
10/10/2011	11:13:02 AM	Bubbler valve opened
10/10/2011	11:13:02 AM	Helium MFC set to  500.000000
10/10/2011	11:13:02 AM	H2 MFC set to  0.000000
10/10/2011	11:13:02 AM	BCl3 MFC set to  0.000000
10/10/2011	11:13:02 AM	PHl3 MFC set to  0.000000
10/10/2011	11:13:02 AM	SiCl4 MFC set to  0.000000
10/10/2011	11:13:02 AM	Bypass solenoid MFC set to  0.000000
10/10/2011	11:13:02 AM	Tube furnace set to 900
10/10/2011	11:13:31 AM	H2 valve closed
10/10/2011	11:13:31 AM	BCl3 valve closed
10/10/2011	11:13:31 AM	PH3 valve closed
10/10/2011	11:13:31 AM	SiCl4 pre valve closed
10/10/2011	11:13:31 AM	SiCl4 post valve closed
10/10/2011	11:13:31 AM	Main Vac valve closed
10/10/2011	11:13:31 AM	Bypass valve closed
10/10/2011	11:13:31 AM	Helium valve opened
10/10/2011	11:13:31 AM	Bubbler valve opened
10/10/2011	11:13:31 AM	Helium MFC set to  500.000000
10/10/2011	11:13:31 AM	H2 MFC set to  0.000000
10/10/2011	11:13:31 AM	BCl3 MFC set to  0.000000
10/10/2011	11:13:31 AM	PHl3 MFC set to  0.000000
10/10/2011	11:13:31 AM	SiCl4 MFC set to  0.000000
10/10/2011	11:13:31 AM	Bypass solenoid MFC set to  0.000000
10/10/2011	11:13:31 AM	Tube furnace set to 850
10/10/2011	11:13:32 AM	H2 valve closed
10/10/2011	11:13:32 AM	BCl3 valve closed
10/10/2011	11:13:32 AM	PH3 valve closed
10/10/2011	11:13:32 AM	SiCl4 pre valve closed
10/10/2011	11:13:32 AM	SiCl4 post valve closed
10/10/2011	11:13:32 AM	Main Vac valve closed
10/10/2011	11:13:32 AM	Bypass valve closed
10/10/2011	11:13:32 AM	Helium valve opened
10/10/2011	11:13:32 AM	Bubbler valve opened
10/10/2011	11:13:32 AM	Helium MFC set to  500.000000
10/10/2011	11:13:32 AM	H2 MFC set to  0.000000
10/10/2011	11:13:32 AM	BCl3 MFC set to  0.000000
10/10/2011	11:13:32 AM	PHl3 MFC set to  0.000000
10/10/2011	11:13:32 AM	SiCl4 MFC set to  0.000000
10/10/2011	11:13:32 AM	Bypass solenoid MFC set to  0.000000
10/10/2011	11:13:32 AM	Tube furnace set to 800
10/10/2011	11:13:40 AM	H2 valve closed
10/10/2011	11:13:40 AM	BCl3 valve closed
10/10/2011	11:13:40 AM	PH3 valve closed
10/10/2011	11:13:40 AM	SiCl4 pre valve closed
10/10/2011	11:13:40 AM	SiCl4 post valve closed
10/10/2011	11:13:40 AM	Main Vac valve closed
10/10/2011	11:13:40 AM	Bypass valve closed
10/10/2011	11:13:40 AM	Helium valve opened
10/10/2011	11:13:40 AM	Bubbler valve opened
10/10/2011	11:13:40 AM	Helium MFC set to  500.000000
10/10/2011	11:13:40 AM	H2 MFC set to  0.000000
10/10/2011	11:13:40 AM	BCl3 MFC set to  0.000000
10/10/2011	11:13:40 AM	PHl3 MFC set to  0.000000
10/10/2011	11:13:40 AM	SiCl4 MFC set to  0.000000
10/10/2011	11:13:40 AM	Bypass solenoid MFC set to  0.000000
10/10/2011	11:13:40 AM	Tube furnace set to 750
10/10/2011	11:16:29 AM	H2 valve closed
10/10/2011	11:16:29 AM	BCl3 valve closed
10/10/2011	11:16:29 AM	PH3 valve closed
10/10/2011	11:16:29 AM	SiCl4 pre valve closed
10/10/2011	11:16:29 AM	SiCl4 post valve closed
10/10/2011	11:16:29 AM	Main Vac valve closed
10/10/2011	11:16:29 AM	Bypass valve closed
10/10/2011	11:16:29 AM	Helium valve opened
10/10/2011	11:16:29 AM	Bubbler valve opened
10/10/2011	11:16:29 AM	Helium MFC set to  500.000000
10/10/2011	11:16:29 AM	H2 MFC set to  0.000000
10/10/2011	11:16:29 AM	BCl3 MFC set to  0.000000
10/10/2011	11:16:29 AM	PHl3 MFC set to  0.000000
10/10/2011	11:16:29 AM	SiCl4 MFC set to  0.000000
10/10/2011	11:16:29 AM	Bypass solenoid MFC set to  0.000000
10/10/2011	11:16:29 AM	Tube furnace set to 0
10/10/2011	11:36:00 AM	Helium valve closed
10/10/2011	11:36:00 AM	H2 valve closed
10/10/2011	11:36:00 AM	BCl3 valve closed
10/10/2011	11:36:00 AM	PH3 valve closed
10/10/2011	11:36:00 AM	SiCl4 pre valve closed
10/10/2011	11:36:00 AM	SiCl4 post valve closed
10/10/2011	11:36:00 AM	Main Vac valve closed
10/10/2011	11:36:00 AM	Bypass valve closed
10/10/2011	11:36:00 AM	Bubbler valve closed
10/10/2011	11:36:00 AM	Helium MFC set to  0.000000
10/10/2011	11:36:00 AM	H2 MFC set to  0.000000
10/10/2011	11:36:00 AM	BCl3 MFC set to  0.000000
10/10/2011	11:36:00 AM	PHl3 MFC set to  0.000000
10/10/2011	11:36:00 AM	SiCl4 MFC set to  0.000000
10/10/2011	11:36:00 AM	Bypass solenoid MFC set to  0.000000
10/10/2011	11:36:00 AM	Tube furnace set to 0
10/10/2011	11:36:01 AM	Run finished at 11:36 AM
10/10/2011	11:36:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/10/2011	11:36:06 AM	Recipe started at 11:36 AM
10/10/2011	11:36:06 AM	Helium valve closed
10/10/2011	11:36:06 AM	H2 valve closed
10/10/2011	11:36:06 AM	BCl3 valve closed
10/10/2011	11:36:06 AM	PH3 valve closed
10/10/2011	11:36:06 AM	SiCl4 pre valve closed
10/10/2011	11:36:06 AM	SiCl4 post valve closed
10/10/2011	11:36:06 AM	Main Vac valve closed
10/10/2011	11:36:06 AM	Bubbler valve closed
10/10/2011	11:36:06 AM	Bypass valve opened
10/10/2011	11:36:06 AM	Helium MFC set to  0.000000
10/10/2011	11:36:06 AM	H2 MFC set to  0.000000
10/10/2011	11:36:06 AM	BCl3 MFC set to  0.000000
10/10/2011	11:36:06 AM	PHl3 MFC set to  0.000000
10/10/2011	11:36:06 AM	SiCl4 MFC set to  0.000000
10/10/2011	11:36:06 AM	Bypass solenoid MFC set to  0.000000
10/10/2011	11:36:06 AM	Tube furnace set to 0
10/10/2011	11:37:01 AM	Helium valve closed
10/10/2011	11:37:01 AM	H2 valve closed
10/10/2011	11:37:01 AM	BCl3 valve closed
10/10/2011	11:37:01 AM	PH3 valve closed
10/10/2011	11:37:01 AM	SiCl4 pre valve closed
10/10/2011	11:37:01 AM	SiCl4 post valve closed
10/10/2011	11:37:01 AM	Main Vac valve closed
10/10/2011	11:37:01 AM	Bubbler valve closed
10/10/2011	11:37:01 AM	Bypass valve opened
10/10/2011	11:37:01 AM	Helium MFC set to  0.000000
10/10/2011	11:37:01 AM	H2 MFC set to  0.000000
10/10/2011	11:37:01 AM	BCl3 MFC set to  0.000000
10/10/2011	11:37:01 AM	PHl3 MFC set to  0.000000
10/10/2011	11:37:01 AM	SiCl4 MFC set to  0.000000
10/10/2011	11:37:01 AM	Bypass solenoid MFC set to  0.000000
10/10/2011	11:37:01 AM	Tube furnace set to 0
10/10/2011	11:37:57 AM	Helium valve closed
10/10/2011	11:37:57 AM	H2 valve closed
10/10/2011	11:37:57 AM	BCl3 valve closed
10/10/2011	11:37:57 AM	PH3 valve closed
10/10/2011	11:37:57 AM	SiCl4 pre valve closed
10/10/2011	11:37:57 AM	SiCl4 post valve closed
10/10/2011	11:37:57 AM	Bypass valve closed
10/10/2011	11:37:57 AM	Bubbler valve closed
10/10/2011	11:37:57 AM	Main Vac valve opened
10/10/2011	11:37:57 AM	Helium MFC set to  0.000000
10/10/2011	11:37:57 AM	H2 MFC set to  0.000000
10/10/2011	11:37:57 AM	BCl3 MFC set to  0.000000
10/10/2011	11:37:57 AM	PHl3 MFC set to  0.000000
10/10/2011	11:37:57 AM	SiCl4 MFC set to  0.000000
10/10/2011	11:37:57 AM	Bypass solenoid MFC set to  0.000000
10/10/2011	11:37:57 AM	Tube furnace set to 0
10/10/2011	11:37:58 AM	Run finished at 11:37 AM
10/10/2011	11:37:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/10/2011	11:56:48 AM	Main Vac valve closed
10/10/2011	11:56:59 AM	Helium MFC set to  500.000000
10/10/2011	11:57:00 AM	Helium valve opened
10/10/2011	11:58:03 AM	Helium valve closed
10/10/2011	11:58:05 AM	Bypass valve opened
10/10/2011	11:59:01 AM	Bypass valve closed
10/10/2011	11:59:02 AM	Main Vac valve opened
10/10/2011	12:14:34 PM	Main Vac valve closed
10/10/2011	12:14:42 PM	Main Vac valve opened
10/10/2011	12:14:58 PM	Main Vac valve closed
10/10/2011	12:14:59 PM	Helium valve opened
10/10/2011	12:15:55 PM	Helium valve closed
10/10/2011	12:15:56 PM	Bypass valve opened
10/10/2011	12:17:06 PM	Bypass valve closed
10/10/2011	12:17:06 PM	Main Vac valve opened
10/10/2011	12:31:33 PM	Main Vac valve closed
10/10/2011	12:31:48 PM	Main Vac valve opened
10/10/2011	12:31:59 PM	Recipe started at 12:31 PM
10/10/2011	12:31:59 PM	Helium valve closed
10/10/2011	12:31:59 PM	H2 valve closed
10/10/2011	12:31:59 PM	BCl3 valve closed
10/10/2011	12:31:59 PM	PH3 valve closed
10/10/2011	12:31:59 PM	SiCl4 pre valve closed
10/10/2011	12:31:59 PM	SiCl4 post valve closed
10/10/2011	12:31:59 PM	Main Vac valve closed
10/10/2011	12:31:59 PM	Bypass valve closed
10/10/2011	12:31:59 PM	Bubbler valve closed
10/10/2011	12:31:59 PM	Helium MFC set to  0.000000
10/10/2011	12:31:59 PM	H2 MFC set to  0.000000
10/10/2011	12:31:59 PM	BCl3 MFC set to  0.000000
10/10/2011	12:31:59 PM	PHl3 MFC set to  0.000000
10/10/2011	12:31:59 PM	SiCl4 MFC set to  0.000000
10/10/2011	12:31:59 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	12:32:00 PM	Tube furnace set to 0
10/10/2011	12:32:03 PM	Helium valve closed
10/10/2011	12:32:03 PM	BCl3 valve closed
10/10/2011	12:32:03 PM	PH3 valve closed
10/10/2011	12:32:03 PM	SiCl4 pre valve closed
10/10/2011	12:32:03 PM	SiCl4 post valve closed
10/10/2011	12:32:03 PM	Main Vac valve closed
10/10/2011	12:32:03 PM	Bypass valve closed
10/10/2011	12:32:03 PM	Bubbler valve closed
10/10/2011	12:32:03 PM	H2 valve opened
10/10/2011	12:32:03 PM	Helium MFC set to  0.000000
10/10/2011	12:32:03 PM	H2 MFC set to  500.000000
10/10/2011	12:32:03 PM	BCl3 MFC set to  0.000000
10/10/2011	12:32:03 PM	PHl3 MFC set to  0.000000
10/10/2011	12:32:03 PM	SiCl4 MFC set to  0.000000
10/10/2011	12:32:03 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	12:32:03 PM	Tube furnace set to 0
10/10/2011	12:33:07 PM	Helium valve closed
10/10/2011	12:33:07 PM	BCl3 valve closed
10/10/2011	12:33:07 PM	PH3 valve closed
10/10/2011	12:33:07 PM	SiCl4 pre valve closed
10/10/2011	12:33:07 PM	SiCl4 post valve closed
10/10/2011	12:33:07 PM	Main Vac valve closed
10/10/2011	12:33:07 PM	Bypass valve closed
10/10/2011	12:33:07 PM	H2 valve opened
10/10/2011	12:33:07 PM	Bubbler valve opened
10/10/2011	12:33:07 PM	Helium MFC set to  0.000000
10/10/2011	12:33:07 PM	H2 MFC set to  500.000000
10/10/2011	12:33:07 PM	BCl3 MFC set to  0.000000
10/10/2011	12:33:07 PM	PHl3 MFC set to  0.000000
10/10/2011	12:33:07 PM	SiCl4 MFC set to  0.000000
10/10/2011	12:33:07 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	12:33:07 PM	Tube furnace set to 0
10/10/2011	12:33:08 PM	Helium valve closed
10/10/2011	12:33:08 PM	BCl3 valve closed
10/10/2011	12:33:08 PM	PH3 valve closed
10/10/2011	12:33:08 PM	SiCl4 pre valve closed
10/10/2011	12:33:08 PM	SiCl4 post valve closed
10/10/2011	12:33:08 PM	Main Vac valve closed
10/10/2011	12:33:08 PM	Bypass valve closed
10/10/2011	12:33:08 PM	H2 valve opened
10/10/2011	12:33:08 PM	Bubbler valve opened
10/10/2011	12:33:08 PM	Helium MFC set to  0.000000
10/10/2011	12:33:08 PM	H2 MFC set to  500.000000
10/10/2011	12:33:08 PM	BCl3 MFC set to  0.000000
10/10/2011	12:33:08 PM	PHl3 MFC set to  0.000000
10/10/2011	12:33:08 PM	SiCl4 MFC set to  0.000000
10/10/2011	12:33:08 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	12:33:08 PM	Tube furnace set to 1000
10/10/2011	12:53:09 PM	Helium valve closed
10/10/2011	12:53:09 PM	BCl3 valve closed
10/10/2011	12:53:09 PM	PH3 valve closed
10/10/2011	12:53:09 PM	Main Vac valve closed
10/10/2011	12:53:09 PM	Bypass valve closed
10/10/2011	12:53:09 PM	H2 valve opened
10/10/2011	12:53:09 PM	SiCl4 pre valve opened
10/10/2011	12:53:09 PM	SiCl4 post valve opened
10/10/2011	12:53:09 PM	Bubbler valve opened
10/10/2011	12:53:09 PM	Helium MFC set to  0.000000
10/10/2011	12:53:09 PM	H2 MFC set to  500.000000
10/10/2011	12:53:09 PM	BCl3 MFC set to  0.000000
10/10/2011	12:53:09 PM	PHl3 MFC set to  0.000000
10/10/2011	12:53:09 PM	SiCl4 MFC set to  50.000000
10/10/2011	12:53:09 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	12:53:09 PM	Tube furnace set to 1000
10/10/2011	1:53:09 PM	Helium valve closed
10/10/2011	1:53:09 PM	BCl3 valve closed
10/10/2011	1:53:09 PM	PH3 valve closed
10/10/2011	1:53:09 PM	SiCl4 pre valve closed
10/10/2011	1:53:09 PM	SiCl4 post valve closed
10/10/2011	1:53:09 PM	Main Vac valve closed
10/10/2011	1:53:09 PM	Bypass valve closed
10/10/2011	1:53:09 PM	H2 valve opened
10/10/2011	1:53:09 PM	Bubbler valve opened
10/10/2011	1:53:09 PM	Helium MFC set to  0.000000
10/10/2011	1:53:09 PM	H2 MFC set to  500.000000
10/10/2011	1:53:09 PM	BCl3 MFC set to  0.000000
10/10/2011	1:53:09 PM	PHl3 MFC set to  0.000000
10/10/2011	1:53:09 PM	SiCl4 MFC set to  0.000000
10/10/2011	1:53:09 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	1:53:09 PM	Tube furnace set to 950
10/10/2011	1:55:44 PM	H2 valve closed
10/10/2011	1:55:44 PM	BCl3 valve closed
10/10/2011	1:55:44 PM	PH3 valve closed
10/10/2011	1:55:44 PM	SiCl4 pre valve closed
10/10/2011	1:55:44 PM	SiCl4 post valve closed
10/10/2011	1:55:44 PM	Main Vac valve closed
10/10/2011	1:55:44 PM	Bypass valve closed
10/10/2011	1:55:44 PM	Helium valve opened
10/10/2011	1:55:44 PM	Bubbler valve opened
10/10/2011	1:55:44 PM	Helium MFC set to  500.000000
10/10/2011	1:55:44 PM	H2 MFC set to  0.000000
10/10/2011	1:55:44 PM	BCl3 MFC set to  0.000000
10/10/2011	1:55:44 PM	PHl3 MFC set to  0.000000
10/10/2011	1:55:44 PM	SiCl4 MFC set to  0.000000
10/10/2011	1:55:44 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	1:55:44 PM	Tube furnace set to 900
10/10/2011	1:56:02 PM	H2 valve closed
10/10/2011	1:56:02 PM	BCl3 valve closed
10/10/2011	1:56:02 PM	PH3 valve closed
10/10/2011	1:56:02 PM	SiCl4 pre valve closed
10/10/2011	1:56:02 PM	SiCl4 post valve closed
10/10/2011	1:56:02 PM	Main Vac valve closed
10/10/2011	1:56:02 PM	Bypass valve closed
10/10/2011	1:56:02 PM	Helium valve opened
10/10/2011	1:56:02 PM	Bubbler valve opened
10/10/2011	1:56:02 PM	Helium MFC set to  500.000000
10/10/2011	1:56:02 PM	H2 MFC set to  0.000000
10/10/2011	1:56:02 PM	BCl3 MFC set to  0.000000
10/10/2011	1:56:02 PM	PHl3 MFC set to  0.000000
10/10/2011	1:56:02 PM	SiCl4 MFC set to  0.000000
10/10/2011	1:56:02 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	1:56:02 PM	Tube furnace set to 850
10/10/2011	1:56:03 PM	H2 valve closed
10/10/2011	1:56:03 PM	BCl3 valve closed
10/10/2011	1:56:03 PM	PH3 valve closed
10/10/2011	1:56:03 PM	SiCl4 pre valve closed
10/10/2011	1:56:03 PM	SiCl4 post valve closed
10/10/2011	1:56:03 PM	Main Vac valve closed
10/10/2011	1:56:03 PM	Bypass valve closed
10/10/2011	1:56:03 PM	Helium valve opened
10/10/2011	1:56:03 PM	Bubbler valve opened
10/10/2011	1:56:03 PM	Helium MFC set to  500.000000
10/10/2011	1:56:03 PM	H2 MFC set to  0.000000
10/10/2011	1:56:03 PM	BCl3 MFC set to  0.000000
10/10/2011	1:56:03 PM	PHl3 MFC set to  0.000000
10/10/2011	1:56:03 PM	SiCl4 MFC set to  0.000000
10/10/2011	1:56:03 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	1:56:03 PM	Tube furnace set to 800
10/10/2011	1:56:55 PM	H2 valve closed
10/10/2011	1:56:55 PM	BCl3 valve closed
10/10/2011	1:56:55 PM	PH3 valve closed
10/10/2011	1:56:55 PM	SiCl4 pre valve closed
10/10/2011	1:56:55 PM	SiCl4 post valve closed
10/10/2011	1:56:55 PM	Main Vac valve closed
10/10/2011	1:56:55 PM	Bypass valve closed
10/10/2011	1:56:55 PM	Helium valve opened
10/10/2011	1:56:55 PM	Bubbler valve opened
10/10/2011	1:56:55 PM	Helium MFC set to  500.000000
10/10/2011	1:56:55 PM	H2 MFC set to  0.000000
10/10/2011	1:56:55 PM	BCl3 MFC set to  0.000000
10/10/2011	1:56:55 PM	PHl3 MFC set to  0.000000
10/10/2011	1:56:55 PM	SiCl4 MFC set to  0.000000
10/10/2011	1:56:55 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	1:56:55 PM	Tube furnace set to 750
10/10/2011	1:56:59 PM	H2 valve closed
10/10/2011	1:56:59 PM	BCl3 valve closed
10/10/2011	1:56:59 PM	PH3 valve closed
10/10/2011	1:56:59 PM	SiCl4 pre valve closed
10/10/2011	1:56:59 PM	SiCl4 post valve closed
10/10/2011	1:56:59 PM	Main Vac valve closed
10/10/2011	1:56:59 PM	Bypass valve closed
10/10/2011	1:56:59 PM	Helium valve opened
10/10/2011	1:56:59 PM	Bubbler valve opened
10/10/2011	1:56:59 PM	Helium MFC set to  500.000000
10/10/2011	1:56:59 PM	H2 MFC set to  0.000000
10/10/2011	1:56:59 PM	BCl3 MFC set to  0.000000
10/10/2011	1:56:59 PM	PHl3 MFC set to  0.000000
10/10/2011	1:56:59 PM	SiCl4 MFC set to  0.000000
10/10/2011	1:56:59 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	1:56:59 PM	Tube furnace set to 0
10/10/2011	2:16:59 PM	Helium valve closed
10/10/2011	2:16:59 PM	H2 valve closed
10/10/2011	2:16:59 PM	BCl3 valve closed
10/10/2011	2:16:59 PM	PH3 valve closed
10/10/2011	2:16:59 PM	SiCl4 pre valve closed
10/10/2011	2:16:59 PM	SiCl4 post valve closed
10/10/2011	2:16:59 PM	Main Vac valve closed
10/10/2011	2:16:59 PM	Bypass valve closed
10/10/2011	2:16:59 PM	Bubbler valve closed
10/10/2011	2:16:59 PM	Helium MFC set to  0.000000
10/10/2011	2:16:59 PM	H2 MFC set to  0.000000
10/10/2011	2:16:59 PM	BCl3 MFC set to  0.000000
10/10/2011	2:16:59 PM	PHl3 MFC set to  0.000000
10/10/2011	2:16:59 PM	SiCl4 MFC set to  0.000000
10/10/2011	2:16:59 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	2:16:59 PM	Tube furnace set to 0
10/10/2011	2:17:00 PM	Run finished at 2:17 PM
10/10/2011	2:26:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/10/2011	2:26:18 PM	Recipe started at 2:26 PM
10/10/2011	2:26:18 PM	Helium valve closed
10/10/2011	2:26:18 PM	H2 valve closed
10/10/2011	2:26:18 PM	BCl3 valve closed
10/10/2011	2:26:18 PM	PH3 valve closed
10/10/2011	2:26:18 PM	SiCl4 pre valve closed
10/10/2011	2:26:18 PM	SiCl4 post valve closed
10/10/2011	2:26:18 PM	Main Vac valve closed
10/10/2011	2:26:18 PM	Bubbler valve closed
10/10/2011	2:26:18 PM	Bypass valve opened
10/10/2011	2:26:18 PM	Helium MFC set to  0.000000
10/10/2011	2:26:18 PM	H2 MFC set to  0.000000
10/10/2011	2:26:18 PM	BCl3 MFC set to  0.000000
10/10/2011	2:26:18 PM	PHl3 MFC set to  0.000000
10/10/2011	2:26:18 PM	SiCl4 MFC set to  0.000000
10/10/2011	2:26:18 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	2:26:18 PM	Tube furnace set to 0
10/10/2011	2:27:15 PM	Helium valve closed
10/10/2011	2:27:15 PM	H2 valve closed
10/10/2011	2:27:15 PM	BCl3 valve closed
10/10/2011	2:27:15 PM	PH3 valve closed
10/10/2011	2:27:15 PM	SiCl4 pre valve closed
10/10/2011	2:27:15 PM	SiCl4 post valve closed
10/10/2011	2:27:15 PM	Main Vac valve closed
10/10/2011	2:27:15 PM	Bubbler valve closed
10/10/2011	2:27:15 PM	Bypass valve opened
10/10/2011	2:27:15 PM	Helium MFC set to  0.000000
10/10/2011	2:27:15 PM	H2 MFC set to  0.000000
10/10/2011	2:27:15 PM	BCl3 MFC set to  0.000000
10/10/2011	2:27:15 PM	PHl3 MFC set to  0.000000
10/10/2011	2:27:15 PM	SiCl4 MFC set to  0.000000
10/10/2011	2:27:15 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	2:27:15 PM	Tube furnace set to 0
10/10/2011	2:28:05 PM	Run aborted at 2:28 PM
10/10/2011	2:28:05 PM	Helium valve closed
10/10/2011	2:28:05 PM	H2 valve closed
10/10/2011	2:28:05 PM	BCl3 valve closed
10/10/2011	2:28:05 PM	PH3 valve closed
10/10/2011	2:28:05 PM	SiCl4 pre valve closed
10/10/2011	2:28:05 PM	SiCl4 post valve closed
10/10/2011	2:28:05 PM	Bypass valve closed
10/10/2011	2:28:05 PM	Main Vac valve closed
10/10/2011	2:28:05 PM	Bubbler valve closed
10/10/2011	2:28:05 PM	Helium MFC set to  0.000000
10/10/2011	2:28:05 PM	H2 MFC set to  0.000000
10/10/2011	2:28:05 PM	BCl3 MFC set to  0.000000
10/10/2011	2:28:05 PM	PHl3 MFC set to  0.000000
10/10/2011	2:28:05 PM	SiCl4 MFC set to  0.000000
10/10/2011	2:28:05 PM	Tube furnace set to 0
10/10/2011	2:28:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/10/2011	2:28:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/10/2011	2:28:08 PM	Recipe started at 2:28 PM
10/10/2011	2:28:08 PM	Helium valve closed
10/10/2011	2:28:08 PM	H2 valve closed
10/10/2011	2:28:08 PM	BCl3 valve closed
10/10/2011	2:28:08 PM	PH3 valve closed
10/10/2011	2:28:08 PM	SiCl4 pre valve closed
10/10/2011	2:28:08 PM	SiCl4 post valve closed
10/10/2011	2:28:08 PM	Main Vac valve closed
10/10/2011	2:28:08 PM	Bypass valve closed
10/10/2011	2:28:08 PM	Bubbler valve closed
10/10/2011	2:28:08 PM	Helium MFC set to  0.000000
10/10/2011	2:28:08 PM	H2 MFC set to  0.000000
10/10/2011	2:28:08 PM	BCl3 MFC set to  0.000000
10/10/2011	2:28:08 PM	PHl3 MFC set to  0.000000
10/10/2011	2:28:08 PM	SiCl4 MFC set to  0.000000
10/10/2011	2:28:08 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	2:28:08 PM	Tube furnace set to 0
10/10/2011	2:28:11 PM	H2 valve closed
10/10/2011	2:28:11 PM	BCl3 valve closed
10/10/2011	2:28:11 PM	PH3 valve closed
10/10/2011	2:28:11 PM	SiCl4 pre valve closed
10/10/2011	2:28:11 PM	SiCl4 post valve closed
10/10/2011	2:28:11 PM	Main Vac valve closed
10/10/2011	2:28:11 PM	Bypass valve closed
10/10/2011	2:28:11 PM	Bubbler valve closed
10/10/2011	2:28:11 PM	Helium valve opened
10/10/2011	2:28:11 PM	Helium MFC set to  500.000000
10/10/2011	2:28:11 PM	H2 MFC set to  0.000000
10/10/2011	2:28:11 PM	BCl3 MFC set to  0.000000
10/10/2011	2:28:11 PM	PHl3 MFC set to  0.000000
10/10/2011	2:28:11 PM	SiCl4 MFC set to  0.000000
10/10/2011	2:28:11 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	2:28:11 PM	Tube furnace set to 0
10/10/2011	2:29:16 PM	Helium valve closed
10/10/2011	2:29:16 PM	H2 valve closed
10/10/2011	2:29:16 PM	BCl3 valve closed
10/10/2011	2:29:16 PM	PH3 valve closed
10/10/2011	2:29:16 PM	SiCl4 pre valve closed
10/10/2011	2:29:16 PM	SiCl4 post valve closed
10/10/2011	2:29:16 PM	Main Vac valve closed
10/10/2011	2:29:16 PM	Bypass valve closed
10/10/2011	2:29:16 PM	Bubbler valve closed
10/10/2011	2:29:16 PM	Helium MFC set to  0.000000
10/10/2011	2:29:16 PM	H2 MFC set to  0.000000
10/10/2011	2:29:16 PM	BCl3 MFC set to  0.000000
10/10/2011	2:29:16 PM	PHl3 MFC set to  0.000000
10/10/2011	2:29:16 PM	SiCl4 MFC set to  0.000000
10/10/2011	2:29:16 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	2:29:16 PM	Tube furnace set to 0
10/10/2011	2:29:17 PM	Run finished at 2:29 PM
10/10/2011	2:29:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/10/2011	2:38:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/10/2011	2:38:02 PM	Recipe started at 2:38 PM
10/10/2011	2:38:02 PM	Helium valve closed
10/10/2011	2:38:02 PM	H2 valve closed
10/10/2011	2:38:02 PM	BCl3 valve closed
10/10/2011	2:38:02 PM	PH3 valve closed
10/10/2011	2:38:02 PM	SiCl4 pre valve closed
10/10/2011	2:38:02 PM	SiCl4 post valve closed
10/10/2011	2:38:02 PM	Main Vac valve closed
10/10/2011	2:38:02 PM	Bubbler valve closed
10/10/2011	2:38:02 PM	Bypass valve opened
10/10/2011	2:38:02 PM	Helium MFC set to  0.000000
10/10/2011	2:38:02 PM	H2 MFC set to  0.000000
10/10/2011	2:38:02 PM	BCl3 MFC set to  0.000000
10/10/2011	2:38:02 PM	PHl3 MFC set to  0.000000
10/10/2011	2:38:02 PM	SiCl4 MFC set to  0.000000
10/10/2011	2:38:02 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	2:38:02 PM	Tube furnace set to 0
10/10/2011	2:39:13 PM	Helium valve closed
10/10/2011	2:39:13 PM	H2 valve closed
10/10/2011	2:39:13 PM	BCl3 valve closed
10/10/2011	2:39:13 PM	PH3 valve closed
10/10/2011	2:39:13 PM	SiCl4 pre valve closed
10/10/2011	2:39:13 PM	SiCl4 post valve closed
10/10/2011	2:39:13 PM	Main Vac valve closed
10/10/2011	2:39:13 PM	Bubbler valve closed
10/10/2011	2:39:13 PM	Bypass valve opened
10/10/2011	2:39:13 PM	Helium MFC set to  0.000000
10/10/2011	2:39:13 PM	H2 MFC set to  0.000000
10/10/2011	2:39:13 PM	BCl3 MFC set to  0.000000
10/10/2011	2:39:13 PM	PHl3 MFC set to  0.000000
10/10/2011	2:39:13 PM	SiCl4 MFC set to  0.000000
10/10/2011	2:39:13 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	2:39:13 PM	Tube furnace set to 0
10/10/2011	2:40:13 PM	Helium valve closed
10/10/2011	2:40:13 PM	H2 valve closed
10/10/2011	2:40:13 PM	BCl3 valve closed
10/10/2011	2:40:13 PM	PH3 valve closed
10/10/2011	2:40:13 PM	SiCl4 pre valve closed
10/10/2011	2:40:13 PM	SiCl4 post valve closed
10/10/2011	2:40:13 PM	Bypass valve closed
10/10/2011	2:40:13 PM	Bubbler valve closed
10/10/2011	2:40:13 PM	Main Vac valve opened
10/10/2011	2:40:13 PM	Helium MFC set to  0.000000
10/10/2011	2:40:13 PM	H2 MFC set to  0.000000
10/10/2011	2:40:13 PM	BCl3 MFC set to  0.000000
10/10/2011	2:40:13 PM	PHl3 MFC set to  0.000000
10/10/2011	2:40:13 PM	SiCl4 MFC set to  0.000000
10/10/2011	2:40:13 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	2:40:13 PM	Tube furnace set to 0
10/10/2011	2:40:14 PM	Run finished at 2:40 PM
10/10/2011	2:40:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/10/2011	2:40:22 PM	Tube furnace set to 0
10/10/2011	2:42:38 PM	Helium MFC set to  0.001000
10/10/2011	2:42:43 PM	Helium MFC set to  10.000000
10/10/2011	2:42:45 PM	Helium valve opened
10/10/2011	2:43:32 PM	Helium valve closed
10/10/2011	2:43:35 PM	Helium MFC set to  0.000000
10/10/2011	2:45:29 PM	Main Vac valve closed
10/10/2011	2:45:38 PM	Main Vac valve opened
10/10/2011	2:45:59 PM	Main Vac valve closed
10/10/2011	2:46:11 PM	Main Vac valve opened
10/10/2011	2:48:31 PM	Tube furnace set to 500
10/10/2011	3:30:04 PM	Main Vac valve closed
10/10/2011	3:30:17 PM	Main Vac valve opened
10/10/2011	3:30:37 PM	Tube furnace set to 0
10/10/2011	3:30:58 PM	Helium MFC set to  10.000000
10/10/2011	3:31:02 PM	Helium valve opened
10/10/2011	3:31:28 PM	Helium valve closed
10/10/2011	3:33:17 PM	Main Vac valve closed
10/10/2011	3:33:29 PM	Main Vac valve opened
10/10/2011	3:35:53 PM	Recipe started at 3:35 PM
10/10/2011	3:35:53 PM	Helium valve closed
10/10/2011	3:35:53 PM	H2 valve closed
10/10/2011	3:35:53 PM	BCl3 valve closed
10/10/2011	3:35:53 PM	PH3 valve closed
10/10/2011	3:35:53 PM	SiCl4 pre valve closed
10/10/2011	3:35:53 PM	SiCl4 post valve closed
10/10/2011	3:35:53 PM	Main Vac valve closed
10/10/2011	3:35:53 PM	Bypass valve closed
10/10/2011	3:35:53 PM	Bubbler valve closed
10/10/2011	3:35:53 PM	Helium MFC set to  0.000000
10/10/2011	3:35:53 PM	H2 MFC set to  0.000000
10/10/2011	3:35:53 PM	BCl3 MFC set to  0.000000
10/10/2011	3:35:53 PM	PHl3 MFC set to  0.000000
10/10/2011	3:35:53 PM	SiCl4 MFC set to  0.000000
10/10/2011	3:35:53 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	3:35:53 PM	Tube furnace set to 0
10/10/2011	3:35:56 PM	Helium valve closed
10/10/2011	3:35:56 PM	BCl3 valve closed
10/10/2011	3:35:56 PM	PH3 valve closed
10/10/2011	3:35:56 PM	SiCl4 pre valve closed
10/10/2011	3:35:56 PM	SiCl4 post valve closed
10/10/2011	3:35:56 PM	Main Vac valve closed
10/10/2011	3:35:56 PM	Bypass valve closed
10/10/2011	3:35:56 PM	Bubbler valve closed
10/10/2011	3:35:56 PM	H2 valve opened
10/10/2011	3:35:56 PM	Helium MFC set to  0.000000
10/10/2011	3:35:56 PM	H2 MFC set to  500.000000
10/10/2011	3:35:56 PM	BCl3 MFC set to  0.000000
10/10/2011	3:35:56 PM	PHl3 MFC set to  0.000000
10/10/2011	3:35:56 PM	SiCl4 MFC set to  0.000000
10/10/2011	3:35:56 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	3:35:57 PM	Tube furnace set to 0
10/10/2011	3:36:56 PM	Helium valve closed
10/10/2011	3:36:56 PM	BCl3 valve closed
10/10/2011	3:36:56 PM	PH3 valve closed
10/10/2011	3:36:56 PM	SiCl4 pre valve closed
10/10/2011	3:36:56 PM	SiCl4 post valve closed
10/10/2011	3:36:56 PM	Main Vac valve closed
10/10/2011	3:36:56 PM	Bypass valve closed
10/10/2011	3:36:56 PM	H2 valve opened
10/10/2011	3:36:56 PM	Bubbler valve opened
10/10/2011	3:36:56 PM	Helium MFC set to  0.000000
10/10/2011	3:36:56 PM	H2 MFC set to  500.000000
10/10/2011	3:36:56 PM	BCl3 MFC set to  0.000000
10/10/2011	3:36:56 PM	PHl3 MFC set to  0.000000
10/10/2011	3:36:56 PM	SiCl4 MFC set to  0.000000
10/10/2011	3:36:56 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	3:36:56 PM	Tube furnace set to 0
10/10/2011	3:36:57 PM	Helium valve closed
10/10/2011	3:36:57 PM	BCl3 valve closed
10/10/2011	3:36:57 PM	PH3 valve closed
10/10/2011	3:36:57 PM	SiCl4 pre valve closed
10/10/2011	3:36:57 PM	SiCl4 post valve closed
10/10/2011	3:36:57 PM	Main Vac valve closed
10/10/2011	3:36:57 PM	Bypass valve closed
10/10/2011	3:36:57 PM	H2 valve opened
10/10/2011	3:36:57 PM	Bubbler valve opened
10/10/2011	3:36:57 PM	Helium MFC set to  0.000000
10/10/2011	3:36:57 PM	H2 MFC set to  500.000000
10/10/2011	3:36:57 PM	BCl3 MFC set to  0.000000
10/10/2011	3:36:57 PM	PHl3 MFC set to  0.000000
10/10/2011	3:36:57 PM	SiCl4 MFC set to  0.000000
10/10/2011	3:36:57 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	3:36:57 PM	Tube furnace set to 1000
10/10/2011	3:56:18 PM	Helium valve closed
10/10/2011	3:56:18 PM	PH3 valve closed
10/10/2011	3:56:18 PM	Main Vac valve closed
10/10/2011	3:56:18 PM	Bypass valve closed
10/10/2011	3:56:18 PM	H2 valve opened
10/10/2011	3:56:18 PM	BCl3 valve opened
10/10/2011	3:56:18 PM	SiCl4 pre valve opened
10/10/2011	3:56:18 PM	SiCl4 post valve opened
10/10/2011	3:56:18 PM	Bubbler valve opened
10/10/2011	3:56:18 PM	Helium MFC set to  0.000000
10/10/2011	3:56:18 PM	H2 MFC set to  500.000000
10/10/2011	3:56:18 PM	BCl3 MFC set to  2.000000
10/10/2011	3:56:18 PM	PHl3 MFC set to  0.000000
10/10/2011	3:56:18 PM	SiCl4 MFC set to  50.000000
10/10/2011	3:56:18 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	3:56:18 PM	Tube furnace set to 1000
10/10/2011	4:01:18 PM	Helium valve closed
10/10/2011	4:01:18 PM	BCl3 valve closed
10/10/2011	4:01:18 PM	PH3 valve closed
10/10/2011	4:01:18 PM	SiCl4 pre valve closed
10/10/2011	4:01:18 PM	SiCl4 post valve closed
10/10/2011	4:01:18 PM	Main Vac valve closed
10/10/2011	4:01:18 PM	Bypass valve closed
10/10/2011	4:01:18 PM	H2 valve opened
10/10/2011	4:01:18 PM	Bubbler valve opened
10/10/2011	4:01:18 PM	Helium MFC set to  0.000000
10/10/2011	4:01:18 PM	H2 MFC set to  500.000000
10/10/2011	4:01:18 PM	BCl3 MFC set to  0.000000
10/10/2011	4:01:18 PM	PHl3 MFC set to  0.000000
10/10/2011	4:01:18 PM	SiCl4 MFC set to  0.000000
10/10/2011	4:01:18 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	4:01:18 PM	Tube furnace set to 750
10/10/2011	4:06:18 PM	H2 valve closed
10/10/2011	4:06:18 PM	BCl3 valve closed
10/10/2011	4:06:19 PM	PH3 valve closed
10/10/2011	4:06:19 PM	SiCl4 pre valve closed
10/10/2011	4:06:19 PM	SiCl4 post valve closed
10/10/2011	4:06:19 PM	Main Vac valve closed
10/10/2011	4:06:19 PM	Bypass valve closed
10/10/2011	4:06:19 PM	Helium valve opened
10/10/2011	4:06:19 PM	Bubbler valve opened
10/10/2011	4:06:19 PM	Helium MFC set to  400.000000
10/10/2011	4:06:19 PM	H2 MFC set to  0.000000
10/10/2011	4:06:19 PM	BCl3 MFC set to  0.000000
10/10/2011	4:06:19 PM	PHl3 MFC set to  0.000000
10/10/2011	4:06:19 PM	SiCl4 MFC set to  0.000000
10/10/2011	4:06:19 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	4:06:19 PM	Tube furnace set to 0
10/10/2011	4:26:19 PM	Helium valve closed
10/10/2011	4:26:19 PM	H2 valve closed
10/10/2011	4:26:19 PM	BCl3 valve closed
10/10/2011	4:26:19 PM	PH3 valve closed
10/10/2011	4:26:19 PM	SiCl4 pre valve closed
10/10/2011	4:26:19 PM	SiCl4 post valve closed
10/10/2011	4:26:19 PM	Main Vac valve closed
10/10/2011	4:26:19 PM	Bypass valve closed
10/10/2011	4:26:19 PM	Bubbler valve closed
10/10/2011	4:26:19 PM	Helium MFC set to  0.000000
10/10/2011	4:26:19 PM	H2 MFC set to  0.000000
10/10/2011	4:26:19 PM	BCl3 MFC set to  0.000000
10/10/2011	4:26:19 PM	PHl3 MFC set to  0.000000
10/10/2011	4:26:19 PM	SiCl4 MFC set to  0.000000
10/10/2011	4:26:19 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	4:26:19 PM	Tube furnace set to 0
10/10/2011	4:32:52 PM	Run finished at 4:32 PM
10/10/2011	4:33:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/10/2011	4:33:08 PM	Recipe started at 4:33 PM
10/10/2011	4:33:08 PM	Helium valve closed
10/10/2011	4:33:08 PM	H2 valve closed
10/10/2011	4:33:08 PM	BCl3 valve closed
10/10/2011	4:33:08 PM	PH3 valve closed
10/10/2011	4:33:08 PM	SiCl4 pre valve closed
10/10/2011	4:33:08 PM	SiCl4 post valve closed
10/10/2011	4:33:08 PM	Main Vac valve closed
10/10/2011	4:33:08 PM	Bubbler valve closed
10/10/2011	4:33:08 PM	Bypass valve opened
10/10/2011	4:33:08 PM	Helium MFC set to  0.000000
10/10/2011	4:33:08 PM	H2 MFC set to  0.000000
10/10/2011	4:33:08 PM	BCl3 MFC set to  0.000000
10/10/2011	4:33:08 PM	PHl3 MFC set to  0.000000
10/10/2011	4:33:08 PM	SiCl4 MFC set to  0.000000
10/10/2011	4:33:08 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	4:33:08 PM	Tube furnace set to 0
10/10/2011	4:34:02 PM	Helium valve closed
10/10/2011	4:34:02 PM	H2 valve closed
10/10/2011	4:34:02 PM	BCl3 valve closed
10/10/2011	4:34:02 PM	PH3 valve closed
10/10/2011	4:34:02 PM	SiCl4 pre valve closed
10/10/2011	4:34:02 PM	SiCl4 post valve closed
10/10/2011	4:34:02 PM	Main Vac valve closed
10/10/2011	4:34:02 PM	Bubbler valve closed
10/10/2011	4:34:02 PM	Bypass valve opened
10/10/2011	4:34:02 PM	Helium MFC set to  0.000000
10/10/2011	4:34:02 PM	H2 MFC set to  0.000000
10/10/2011	4:34:02 PM	BCl3 MFC set to  0.000000
10/10/2011	4:34:02 PM	PHl3 MFC set to  0.000000
10/10/2011	4:34:02 PM	SiCl4 MFC set to  0.000000
10/10/2011	4:34:02 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	4:34:02 PM	Tube furnace set to 0
10/10/2011	4:34:13 PM	Run aborted at 4:34 PM
10/10/2011	4:34:13 PM	Helium valve closed
10/10/2011	4:34:13 PM	H2 valve closed
10/10/2011	4:34:13 PM	BCl3 valve closed
10/10/2011	4:34:13 PM	PH3 valve closed
10/10/2011	4:34:13 PM	SiCl4 pre valve closed
10/10/2011	4:34:13 PM	SiCl4 post valve closed
10/10/2011	4:34:13 PM	Bypass valve closed
10/10/2011	4:34:13 PM	Main Vac valve closed
10/10/2011	4:34:13 PM	Bubbler valve closed
10/10/2011	4:34:13 PM	Helium MFC set to  0.000000
10/10/2011	4:34:13 PM	H2 MFC set to  0.000000
10/10/2011	4:34:13 PM	BCl3 MFC set to  0.000000
10/10/2011	4:34:13 PM	PHl3 MFC set to  0.000000
10/10/2011	4:34:13 PM	SiCl4 MFC set to  0.000000
10/10/2011	4:34:13 PM	Tube furnace set to 0
10/10/2011	4:34:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/10/2011	4:34:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/10/2011	4:34:15 PM	Recipe started at 4:34 PM
10/10/2011	4:34:15 PM	Helium valve closed
10/10/2011	4:34:15 PM	H2 valve closed
10/10/2011	4:34:15 PM	BCl3 valve closed
10/10/2011	4:34:15 PM	PH3 valve closed
10/10/2011	4:34:15 PM	SiCl4 pre valve closed
10/10/2011	4:34:15 PM	SiCl4 post valve closed
10/10/2011	4:34:15 PM	Main Vac valve closed
10/10/2011	4:34:15 PM	Bypass valve closed
10/10/2011	4:34:15 PM	Bubbler valve closed
10/10/2011	4:34:15 PM	Helium MFC set to  0.000000
10/10/2011	4:34:15 PM	H2 MFC set to  0.000000
10/10/2011	4:34:15 PM	BCl3 MFC set to  0.000000
10/10/2011	4:34:15 PM	PHl3 MFC set to  0.000000
10/10/2011	4:34:15 PM	SiCl4 MFC set to  0.000000
10/10/2011	4:34:15 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	4:34:16 PM	Tube furnace set to 0
10/10/2011	4:34:19 PM	H2 valve closed
10/10/2011	4:34:19 PM	BCl3 valve closed
10/10/2011	4:34:19 PM	PH3 valve closed
10/10/2011	4:34:19 PM	SiCl4 pre valve closed
10/10/2011	4:34:19 PM	SiCl4 post valve closed
10/10/2011	4:34:19 PM	Main Vac valve closed
10/10/2011	4:34:19 PM	Bypass valve closed
10/10/2011	4:34:19 PM	Bubbler valve closed
10/10/2011	4:34:19 PM	Helium valve opened
10/10/2011	4:34:19 PM	Helium MFC set to  500.000000
10/10/2011	4:34:19 PM	H2 MFC set to  0.000000
10/10/2011	4:34:19 PM	BCl3 MFC set to  0.000000
10/10/2011	4:34:19 PM	PHl3 MFC set to  0.000000
10/10/2011	4:34:19 PM	SiCl4 MFC set to  0.000000
10/10/2011	4:34:19 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	4:34:19 PM	Tube furnace set to 0
10/10/2011	4:35:23 PM	Helium valve closed
10/10/2011	4:35:23 PM	H2 valve closed
10/10/2011	4:35:23 PM	BCl3 valve closed
10/10/2011	4:35:23 PM	PH3 valve closed
10/10/2011	4:35:23 PM	SiCl4 pre valve closed
10/10/2011	4:35:23 PM	SiCl4 post valve closed
10/10/2011	4:35:23 PM	Main Vac valve closed
10/10/2011	4:35:23 PM	Bypass valve closed
10/10/2011	4:35:23 PM	Bubbler valve closed
10/10/2011	4:35:23 PM	Helium MFC set to  0.000000
10/10/2011	4:35:23 PM	H2 MFC set to  0.000000
10/10/2011	4:35:23 PM	BCl3 MFC set to  0.000000
10/10/2011	4:35:23 PM	PHl3 MFC set to  0.000000
10/10/2011	4:35:23 PM	SiCl4 MFC set to  0.000000
10/10/2011	4:35:23 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	4:35:23 PM	Tube furnace set to 0
10/10/2011	4:35:24 PM	Run finished at 4:35 PM
10/10/2011	4:35:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/10/2011	4:37:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/10/2011	4:37:52 PM	Recipe started at 4:37 PM
10/10/2011	4:37:52 PM	Helium valve closed
10/10/2011	4:37:52 PM	H2 valve closed
10/10/2011	4:37:52 PM	BCl3 valve closed
10/10/2011	4:37:52 PM	PH3 valve closed
10/10/2011	4:37:52 PM	SiCl4 pre valve closed
10/10/2011	4:37:52 PM	SiCl4 post valve closed
10/10/2011	4:37:52 PM	Main Vac valve closed
10/10/2011	4:37:52 PM	Bubbler valve closed
10/10/2011	4:37:52 PM	Bypass valve opened
10/10/2011	4:37:52 PM	Helium MFC set to  0.000000
10/10/2011	4:37:52 PM	H2 MFC set to  0.000000
10/10/2011	4:37:52 PM	BCl3 MFC set to  0.000000
10/10/2011	4:37:52 PM	PHl3 MFC set to  0.000000
10/10/2011	4:37:52 PM	SiCl4 MFC set to  0.000000
10/10/2011	4:37:52 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	4:37:52 PM	Tube furnace set to 0
10/10/2011	4:38:55 PM	Helium valve closed
10/10/2011	4:38:55 PM	H2 valve closed
10/10/2011	4:38:55 PM	BCl3 valve closed
10/10/2011	4:38:55 PM	PH3 valve closed
10/10/2011	4:38:55 PM	SiCl4 pre valve closed
10/10/2011	4:38:55 PM	SiCl4 post valve closed
10/10/2011	4:38:55 PM	Main Vac valve closed
10/10/2011	4:38:55 PM	Bubbler valve closed
10/10/2011	4:38:55 PM	Bypass valve opened
10/10/2011	4:38:55 PM	Helium MFC set to  0.000000
10/10/2011	4:38:55 PM	H2 MFC set to  0.000000
10/10/2011	4:38:55 PM	BCl3 MFC set to  0.000000
10/10/2011	4:38:55 PM	PHl3 MFC set to  0.000000
10/10/2011	4:38:55 PM	SiCl4 MFC set to  0.000000
10/10/2011	4:38:55 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	4:38:56 PM	Tube furnace set to 0
10/10/2011	4:39:56 PM	Helium valve closed
10/10/2011	4:39:56 PM	H2 valve closed
10/10/2011	4:39:56 PM	BCl3 valve closed
10/10/2011	4:39:56 PM	PH3 valve closed
10/10/2011	4:39:56 PM	SiCl4 pre valve closed
10/10/2011	4:39:56 PM	SiCl4 post valve closed
10/10/2011	4:39:56 PM	Bypass valve closed
10/10/2011	4:39:56 PM	Bubbler valve closed
10/10/2011	4:39:56 PM	Main Vac valve opened
10/10/2011	4:39:56 PM	Helium MFC set to  0.000000
10/10/2011	4:39:56 PM	H2 MFC set to  0.000000
10/10/2011	4:39:56 PM	BCl3 MFC set to  0.000000
10/10/2011	4:39:56 PM	PHl3 MFC set to  0.000000
10/10/2011	4:39:56 PM	SiCl4 MFC set to  0.000000
10/10/2011	4:39:56 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	4:39:56 PM	Tube furnace set to 0
10/10/2011	4:39:57 PM	Run finished at 4:39 PM
10/10/2011	4:39:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/10/2011	5:02:10 PM	Helium MFC set to  10.000000
10/10/2011	5:02:10 PM	Helium valve opened
10/10/2011	5:12:12 PM	Helium valve closed
10/10/2011	5:12:14 PM	Helium MFC set to  0.000000
10/10/2011	5:12:41 PM	Main Vac valve closed
10/10/2011	5:12:53 PM	Main Vac valve opened
10/10/2011	5:26:09 PM	Main Vac valve closed
10/10/2011	5:26:21 PM	Main Vac valve opened
10/10/2011	5:28:15 PM	Main Vac valve closed
10/10/2011	5:28:29 PM	Main Vac valve opened
10/10/2011	5:34:46 PM	Main Vac valve closed
10/10/2011	5:34:57 PM	Main Vac valve opened
10/10/2011	5:41:00 PM	Recipe started at 5:40 PM
10/10/2011	5:41:00 PM	Helium valve closed
10/10/2011	5:41:00 PM	H2 valve closed
10/10/2011	5:41:00 PM	BCl3 valve closed
10/10/2011	5:41:00 PM	PH3 valve closed
10/10/2011	5:41:00 PM	SiCl4 pre valve closed
10/10/2011	5:41:00 PM	SiCl4 post valve closed
10/10/2011	5:41:00 PM	Main Vac valve closed
10/10/2011	5:41:00 PM	Bypass valve closed
10/10/2011	5:41:00 PM	Bubbler valve closed
10/10/2011	5:41:00 PM	Helium MFC set to  0.000000
10/10/2011	5:41:00 PM	H2 MFC set to  0.000000
10/10/2011	5:41:00 PM	BCl3 MFC set to  0.000000
10/10/2011	5:41:00 PM	PHl3 MFC set to  0.000000
10/10/2011	5:41:00 PM	SiCl4 MFC set to  0.000000
10/10/2011	5:41:00 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	5:41:01 PM	Tube furnace set to 0
10/10/2011	5:41:04 PM	Helium valve closed
10/10/2011	5:41:04 PM	BCl3 valve closed
10/10/2011	5:41:04 PM	PH3 valve closed
10/10/2011	5:41:04 PM	SiCl4 pre valve closed
10/10/2011	5:41:04 PM	SiCl4 post valve closed
10/10/2011	5:41:04 PM	Main Vac valve closed
10/10/2011	5:41:04 PM	Bypass valve closed
10/10/2011	5:41:04 PM	Bubbler valve closed
10/10/2011	5:41:04 PM	H2 valve opened
10/10/2011	5:41:04 PM	Helium MFC set to  0.000000
10/10/2011	5:41:04 PM	H2 MFC set to  500.000000
10/10/2011	5:41:04 PM	BCl3 MFC set to  0.000000
10/10/2011	5:41:04 PM	PHl3 MFC set to  0.000000
10/10/2011	5:41:04 PM	SiCl4 MFC set to  0.000000
10/10/2011	5:41:04 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	5:41:04 PM	Tube furnace set to 0
10/10/2011	5:42:09 PM	Helium valve closed
10/10/2011	5:42:09 PM	BCl3 valve closed
10/10/2011	5:42:09 PM	PH3 valve closed
10/10/2011	5:42:09 PM	SiCl4 pre valve closed
10/10/2011	5:42:09 PM	SiCl4 post valve closed
10/10/2011	5:42:09 PM	Main Vac valve closed
10/10/2011	5:42:09 PM	Bypass valve closed
10/10/2011	5:42:09 PM	H2 valve opened
10/10/2011	5:42:09 PM	Bubbler valve opened
10/10/2011	5:42:09 PM	Helium MFC set to  0.000000
10/10/2011	5:42:09 PM	H2 MFC set to  500.000000
10/10/2011	5:42:09 PM	BCl3 MFC set to  0.000000
10/10/2011	5:42:09 PM	PHl3 MFC set to  0.000000
10/10/2011	5:42:09 PM	SiCl4 MFC set to  0.000000
10/10/2011	5:42:09 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	5:42:09 PM	Tube furnace set to 0
10/10/2011	5:42:10 PM	Helium valve closed
10/10/2011	5:42:10 PM	BCl3 valve closed
10/10/2011	5:42:10 PM	PH3 valve closed
10/10/2011	5:42:10 PM	SiCl4 pre valve closed
10/10/2011	5:42:10 PM	SiCl4 post valve closed
10/10/2011	5:42:10 PM	Main Vac valve closed
10/10/2011	5:42:10 PM	Bypass valve closed
10/10/2011	5:42:10 PM	H2 valve opened
10/10/2011	5:42:10 PM	Bubbler valve opened
10/10/2011	5:42:10 PM	Helium MFC set to  0.000000
10/10/2011	5:42:10 PM	H2 MFC set to  500.000000
10/10/2011	5:42:10 PM	BCl3 MFC set to  0.000000
10/10/2011	5:42:10 PM	PHl3 MFC set to  0.000000
10/10/2011	5:42:10 PM	SiCl4 MFC set to  0.000000
10/10/2011	5:42:10 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	5:42:10 PM	Tube furnace set to 1000
10/10/2011	6:03:10 PM	Helium valve closed
10/10/2011	6:03:10 PM	PH3 valve closed
10/10/2011	6:03:10 PM	Main Vac valve closed
10/10/2011	6:03:10 PM	Bypass valve closed
10/10/2011	6:03:10 PM	H2 valve opened
10/10/2011	6:03:10 PM	BCl3 valve opened
10/10/2011	6:03:10 PM	SiCl4 pre valve opened
10/10/2011	6:03:10 PM	SiCl4 post valve opened
10/10/2011	6:03:10 PM	Bubbler valve opened
10/10/2011	6:03:10 PM	Helium MFC set to  0.000000
10/10/2011	6:03:10 PM	H2 MFC set to  500.000000
10/10/2011	6:03:10 PM	BCl3 MFC set to  2.000000
10/10/2011	6:03:10 PM	PHl3 MFC set to  0.000000
10/10/2011	6:03:10 PM	SiCl4 MFC set to  50.000000
10/10/2011	6:03:10 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	6:03:11 PM	Tube furnace set to 1000
10/10/2011	6:13:11 PM	Helium valve closed
10/10/2011	6:13:11 PM	BCl3 valve closed
10/10/2011	6:13:11 PM	PH3 valve closed
10/10/2011	6:13:11 PM	SiCl4 pre valve closed
10/10/2011	6:13:11 PM	SiCl4 post valve closed
10/10/2011	6:13:11 PM	Main Vac valve closed
10/10/2011	6:13:11 PM	Bypass valve closed
10/10/2011	6:13:11 PM	H2 valve opened
10/10/2011	6:13:11 PM	Bubbler valve opened
10/10/2011	6:13:11 PM	Helium MFC set to  0.000000
10/10/2011	6:13:11 PM	H2 MFC set to  500.000000
10/10/2011	6:13:11 PM	BCl3 MFC set to  0.000000
10/10/2011	6:13:11 PM	PHl3 MFC set to  0.000000
10/10/2011	6:13:11 PM	SiCl4 MFC set to  0.000000
10/10/2011	6:13:11 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	6:13:11 PM	Tube furnace set to 750
10/10/2011	6:18:11 PM	H2 valve closed
10/10/2011	6:18:11 PM	BCl3 valve closed
10/10/2011	6:18:11 PM	PH3 valve closed
10/10/2011	6:18:11 PM	SiCl4 pre valve closed
10/10/2011	6:18:11 PM	SiCl4 post valve closed
10/10/2011	6:18:11 PM	Main Vac valve closed
10/10/2011	6:18:11 PM	Bypass valve closed
10/10/2011	6:18:11 PM	Helium valve opened
10/10/2011	6:18:11 PM	Bubbler valve opened
10/10/2011	6:18:11 PM	Helium MFC set to  400.000000
10/10/2011	6:18:11 PM	H2 MFC set to  0.000000
10/10/2011	6:18:11 PM	BCl3 MFC set to  0.000000
10/10/2011	6:18:11 PM	PHl3 MFC set to  0.000000
10/10/2011	6:18:11 PM	SiCl4 MFC set to  0.000000
10/10/2011	6:18:11 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	6:18:11 PM	Tube furnace set to 0
10/10/2011	6:38:11 PM	Helium valve closed
10/10/2011	6:38:11 PM	H2 valve closed
10/10/2011	6:38:11 PM	BCl3 valve closed
10/10/2011	6:38:11 PM	PH3 valve closed
10/10/2011	6:38:11 PM	SiCl4 pre valve closed
10/10/2011	6:38:11 PM	SiCl4 post valve closed
10/10/2011	6:38:11 PM	Main Vac valve closed
10/10/2011	6:38:11 PM	Bypass valve closed
10/10/2011	6:38:11 PM	Bubbler valve closed
10/10/2011	6:38:11 PM	Helium MFC set to  0.000000
10/10/2011	6:38:11 PM	H2 MFC set to  0.000000
10/10/2011	6:38:11 PM	BCl3 MFC set to  0.000000
10/10/2011	6:38:11 PM	PHl3 MFC set to  0.000000
10/10/2011	6:38:11 PM	SiCl4 MFC set to  0.000000
10/10/2011	6:38:11 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	6:38:11 PM	Tube furnace set to 0
10/10/2011	6:44:36 PM	Run finished at 6:44 PM
10/10/2011	6:44:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/10/2011	6:44:42 PM	Recipe started at 6:44 PM
10/10/2011	6:44:42 PM	Helium valve closed
10/10/2011	6:44:42 PM	H2 valve closed
10/10/2011	6:44:42 PM	BCl3 valve closed
10/10/2011	6:44:42 PM	PH3 valve closed
10/10/2011	6:44:42 PM	SiCl4 pre valve closed
10/10/2011	6:44:42 PM	SiCl4 post valve closed
10/10/2011	6:44:42 PM	Main Vac valve closed
10/10/2011	6:44:42 PM	Bubbler valve closed
10/10/2011	6:44:42 PM	Bypass valve opened
10/10/2011	6:44:42 PM	Helium MFC set to  0.000000
10/10/2011	6:44:42 PM	H2 MFC set to  0.000000
10/10/2011	6:44:42 PM	BCl3 MFC set to  0.000000
10/10/2011	6:44:42 PM	PHl3 MFC set to  0.000000
10/10/2011	6:44:42 PM	SiCl4 MFC set to  0.000000
10/10/2011	6:44:42 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	6:44:42 PM	Tube furnace set to 0
10/10/2011	6:44:58 PM	Run aborted at 6:44 PM
10/10/2011	6:44:58 PM	Helium valve closed
10/10/2011	6:44:58 PM	H2 valve closed
10/10/2011	6:44:58 PM	BCl3 valve closed
10/10/2011	6:44:58 PM	PH3 valve closed
10/10/2011	6:44:58 PM	SiCl4 pre valve closed
10/10/2011	6:44:58 PM	SiCl4 post valve closed
10/10/2011	6:44:58 PM	Bypass valve closed
10/10/2011	6:44:58 PM	Main Vac valve closed
10/10/2011	6:44:58 PM	Bubbler valve closed
10/10/2011	6:44:58 PM	Helium MFC set to  0.000000
10/10/2011	6:44:58 PM	H2 MFC set to  0.000000
10/10/2011	6:44:58 PM	BCl3 MFC set to  0.000000
10/10/2011	6:44:58 PM	PHl3 MFC set to  0.000000
10/10/2011	6:44:58 PM	SiCl4 MFC set to  0.000000
10/10/2011	6:44:58 PM	Tube furnace set to 0
10/10/2011	6:44:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/10/2011	6:45:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/10/2011	6:45:01 PM	Recipe started at 6:45 PM
10/10/2011	6:45:01 PM	Helium valve closed
10/10/2011	6:45:01 PM	H2 valve closed
10/10/2011	6:45:01 PM	BCl3 valve closed
10/10/2011	6:45:01 PM	PH3 valve closed
10/10/2011	6:45:01 PM	SiCl4 pre valve closed
10/10/2011	6:45:01 PM	SiCl4 post valve closed
10/10/2011	6:45:01 PM	Main Vac valve closed
10/10/2011	6:45:01 PM	Bypass valve closed
10/10/2011	6:45:01 PM	Bubbler valve closed
10/10/2011	6:45:01 PM	Helium MFC set to  0.000000
10/10/2011	6:45:01 PM	H2 MFC set to  0.000000
10/10/2011	6:45:01 PM	BCl3 MFC set to  0.000000
10/10/2011	6:45:01 PM	PHl3 MFC set to  0.000000
10/10/2011	6:45:01 PM	SiCl4 MFC set to  0.000000
10/10/2011	6:45:01 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	6:45:01 PM	Tube furnace set to 0
10/10/2011	6:45:04 PM	H2 valve closed
10/10/2011	6:45:04 PM	BCl3 valve closed
10/10/2011	6:45:04 PM	PH3 valve closed
10/10/2011	6:45:04 PM	SiCl4 pre valve closed
10/10/2011	6:45:04 PM	SiCl4 post valve closed
10/10/2011	6:45:04 PM	Main Vac valve closed
10/10/2011	6:45:04 PM	Bypass valve closed
10/10/2011	6:45:04 PM	Bubbler valve closed
10/10/2011	6:45:04 PM	Helium valve opened
10/10/2011	6:45:04 PM	Helium MFC set to  500.000000
10/10/2011	6:45:04 PM	H2 MFC set to  0.000000
10/10/2011	6:45:04 PM	BCl3 MFC set to  0.000000
10/10/2011	6:45:04 PM	PHl3 MFC set to  0.000000
10/10/2011	6:45:04 PM	SiCl4 MFC set to  0.000000
10/10/2011	6:45:04 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	6:45:04 PM	Tube furnace set to 0
10/10/2011	6:46:04 PM	Helium valve closed
10/10/2011	6:46:04 PM	H2 valve closed
10/10/2011	6:46:04 PM	BCl3 valve closed
10/10/2011	6:46:04 PM	PH3 valve closed
10/10/2011	6:46:04 PM	SiCl4 pre valve closed
10/10/2011	6:46:04 PM	SiCl4 post valve closed
10/10/2011	6:46:04 PM	Main Vac valve closed
10/10/2011	6:46:04 PM	Bypass valve closed
10/10/2011	6:46:04 PM	Bubbler valve closed
10/10/2011	6:46:04 PM	Helium MFC set to  0.000000
10/10/2011	6:46:04 PM	H2 MFC set to  0.000000
10/10/2011	6:46:04 PM	BCl3 MFC set to  0.000000
10/10/2011	6:46:04 PM	PHl3 MFC set to  0.000000
10/10/2011	6:46:04 PM	SiCl4 MFC set to  0.000000
10/10/2011	6:46:04 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	6:46:05 PM	Tube furnace set to 0
10/10/2011	6:46:06 PM	Run finished at 6:46 PM
10/10/2011	6:46:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/10/2011	6:49:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/10/2011	6:49:39 PM	Recipe started at 6:49 PM
10/10/2011	6:49:39 PM	Helium valve closed
10/10/2011	6:49:39 PM	H2 valve closed
10/10/2011	6:49:39 PM	BCl3 valve closed
10/10/2011	6:49:39 PM	PH3 valve closed
10/10/2011	6:49:39 PM	SiCl4 pre valve closed
10/10/2011	6:49:39 PM	SiCl4 post valve closed
10/10/2011	6:49:39 PM	Main Vac valve closed
10/10/2011	6:49:39 PM	Bubbler valve closed
10/10/2011	6:49:39 PM	Bypass valve opened
10/10/2011	6:49:40 PM	Helium MFC set to  0.000000
10/10/2011	6:49:40 PM	H2 MFC set to  0.000000
10/10/2011	6:49:40 PM	BCl3 MFC set to  0.000000
10/10/2011	6:49:40 PM	PHl3 MFC set to  0.000000
10/10/2011	6:49:40 PM	SiCl4 MFC set to  0.000000
10/10/2011	6:49:40 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	6:49:40 PM	Tube furnace set to 0
10/10/2011	6:50:43 PM	Helium valve closed
10/10/2011	6:50:43 PM	H2 valve closed
10/10/2011	6:50:43 PM	BCl3 valve closed
10/10/2011	6:50:43 PM	PH3 valve closed
10/10/2011	6:50:43 PM	SiCl4 pre valve closed
10/10/2011	6:50:43 PM	SiCl4 post valve closed
10/10/2011	6:50:43 PM	Main Vac valve closed
10/10/2011	6:50:43 PM	Bubbler valve closed
10/10/2011	6:50:43 PM	Bypass valve opened
10/10/2011	6:50:43 PM	Helium MFC set to  0.000000
10/10/2011	6:50:43 PM	H2 MFC set to  0.000000
10/10/2011	6:50:43 PM	BCl3 MFC set to  0.000000
10/10/2011	6:50:43 PM	PHl3 MFC set to  0.000000
10/10/2011	6:50:43 PM	SiCl4 MFC set to  0.000000
10/10/2011	6:50:43 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	6:50:43 PM	Tube furnace set to 0
10/10/2011	6:51:43 PM	Helium valve closed
10/10/2011	6:51:43 PM	H2 valve closed
10/10/2011	6:51:43 PM	BCl3 valve closed
10/10/2011	6:51:43 PM	PH3 valve closed
10/10/2011	6:51:43 PM	SiCl4 pre valve closed
10/10/2011	6:51:43 PM	SiCl4 post valve closed
10/10/2011	6:51:43 PM	Bypass valve closed
10/10/2011	6:51:43 PM	Bubbler valve closed
10/10/2011	6:51:43 PM	Main Vac valve opened
10/10/2011	6:51:43 PM	Helium MFC set to  0.000000
10/10/2011	6:51:43 PM	H2 MFC set to  0.000000
10/10/2011	6:51:43 PM	BCl3 MFC set to  0.000000
10/10/2011	6:51:43 PM	PHl3 MFC set to  0.000000
10/10/2011	6:51:43 PM	SiCl4 MFC set to  0.000000
10/10/2011	6:51:43 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	6:51:44 PM	Tube furnace set to 0
10/10/2011	6:51:45 PM	Run finished at 6:51 PM
10/10/2011	6:51:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/10/2011	6:58:06 PM	Helium MFC set to  10.000000
10/10/2011	6:58:07 PM	Helium valve opened
10/10/2011	6:58:27 PM	Helium valve closed
10/10/2011	7:40:19 PM	Helium MFC set to  500.000000
10/10/2011	7:40:29 PM	Main Vac valve closed
10/10/2011	7:40:33 PM	Helium valve opened
10/10/2011	7:41:18 PM	Helium valve closed
10/10/2011	7:41:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/10/2011	7:41:21 PM	Recipe started at 7:41 PM
10/10/2011	7:41:21 PM	Helium valve closed
10/10/2011	7:41:21 PM	H2 valve closed
10/10/2011	7:41:21 PM	BCl3 valve closed
10/10/2011	7:41:21 PM	PH3 valve closed
10/10/2011	7:41:21 PM	SiCl4 pre valve closed
10/10/2011	7:41:21 PM	SiCl4 post valve closed
10/10/2011	7:41:21 PM	Main Vac valve closed
10/10/2011	7:41:21 PM	Bubbler valve closed
10/10/2011	7:41:21 PM	Bypass valve opened
10/10/2011	7:41:21 PM	Helium MFC set to  0.000000
10/10/2011	7:41:21 PM	H2 MFC set to  0.000000
10/10/2011	7:41:21 PM	BCl3 MFC set to  0.000000
10/10/2011	7:41:21 PM	PHl3 MFC set to  0.000000
10/10/2011	7:41:21 PM	SiCl4 MFC set to  0.000000
10/10/2011	7:41:21 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	7:41:22 PM	Tube furnace set to 0
10/10/2011	7:42:15 PM	Helium valve closed
10/10/2011	7:42:15 PM	H2 valve closed
10/10/2011	7:42:15 PM	BCl3 valve closed
10/10/2011	7:42:15 PM	PH3 valve closed
10/10/2011	7:42:15 PM	SiCl4 pre valve closed
10/10/2011	7:42:15 PM	SiCl4 post valve closed
10/10/2011	7:42:15 PM	Main Vac valve closed
10/10/2011	7:42:15 PM	Bubbler valve closed
10/10/2011	7:42:15 PM	Bypass valve opened
10/10/2011	7:42:15 PM	Helium MFC set to  0.000000
10/10/2011	7:42:15 PM	H2 MFC set to  0.000000
10/10/2011	7:42:15 PM	BCl3 MFC set to  0.000000
10/10/2011	7:42:15 PM	PHl3 MFC set to  0.000000
10/10/2011	7:42:15 PM	SiCl4 MFC set to  0.000000
10/10/2011	7:42:15 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	7:42:15 PM	Tube furnace set to 0
10/10/2011	7:42:36 PM	Helium valve closed
10/10/2011	7:42:36 PM	H2 valve closed
10/10/2011	7:42:36 PM	BCl3 valve closed
10/10/2011	7:42:36 PM	PH3 valve closed
10/10/2011	7:42:36 PM	SiCl4 pre valve closed
10/10/2011	7:42:36 PM	SiCl4 post valve closed
10/10/2011	7:42:36 PM	Bypass valve closed
10/10/2011	7:42:36 PM	Bubbler valve closed
10/10/2011	7:42:36 PM	Main Vac valve opened
10/10/2011	7:42:36 PM	Helium MFC set to  0.000000
10/10/2011	7:42:36 PM	H2 MFC set to  0.000000
10/10/2011	7:42:36 PM	BCl3 MFC set to  0.000000
10/10/2011	7:42:36 PM	PHl3 MFC set to  0.000000
10/10/2011	7:42:36 PM	SiCl4 MFC set to  0.000000
10/10/2011	7:42:36 PM	Bypass solenoid MFC set to  0.000000
10/10/2011	7:42:36 PM	Tube furnace set to 0
10/10/2011	7:42:37 PM	Run finished at 7:42 PM
10/10/2011	7:42:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/10/2011	8:00:48 PM	Main Vac valve closed
10/10/2011	8:01:09 PM	Main Vac valve opened
10/10/2011	8:37:25 PM	Main Vac valve closed
10/10/2011	8:37:36 PM	Main Vac valve opened
10/10/2011	8:38:25 PM	Main Vac valve closed
10/10/2011	8:38:36 PM	Main Vac valve opened
10/10/2011	9:26:17 PM	Main Vac valve closed
10/10/2011	9:26:29 PM	Main Vac valve opened
